analytical/metrology • IVS 120 optical overlay metrology system • Nanospec interferometer • Tencor stylus profilers • Amray field emission SEM • CDE Resmap (sheet resistance) • Kevex automated XRF • Woolam ellipsometer • KLA-Tencor CD-SEM • Digital Instruments AFM • Nicolet FTIR • CV plot dielectric breakdown tester
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• Phillips TEM with EDX • dual beam FIB/SEM
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• Zygo non-contact surface profiler • Bazic 8 automated dimensional measurement system • SSI automated optical linewidth measurement system • Wyko optical profiler
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also visit IMT Analytical, a wholly owned subsidiary of imt, a fully equipped metrology and analytical lab that complements imt's manufacturing capabilities